Книга: Rf Mems Switching and Integrated Switching Circuits: Microsystems, Import

Microelectromechanical Systems (MEMS) hold out the hope for the next major breakthrough in the silicon revolution that started with the transistor in the 1960s and has revolutionized every aspect of our lives. MEMS allow one not only to observe and process information of all types from small scale systems on the order of the size of a human hair, but also to affect changes in systems and the environment at that scale. RF MEMS switches and switching circuits are a new research field that focuses on developments in both micro RF switches and micromachined switching circuits. This book will build on the extensive body of literature that exists in research papers on analytical and numerical modeling and design based on RF MEMS switches and micromachined switching circuits. The book will present a unified framework with new RF MEMS approaches spanning developments from RF MEMS switches to RF switching circuits and spanning scales from MEMS switch components to MEMS switching circuit systems. This book presents a comprehensive approach to all these aspects of switches and switching circuit systems, showing the complete procedures from design through fabrication and experimentation.